Investigation on Sige Selective Epitaxy for Source and Drain Engineering in 22 Nm CMOS Technology Node and Beyond

Investigation on Sige Selective Epitaxy for Source and Drain Engineering in 22 Nm CMOS Technology Node and Beyond

4/5

E gatisitswe la ntlha: 2020
Bagatisi: Springer Singapore Pte. Limited

Dibuka

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